A key advantage of Axcelis solutions is the support team behind them. Our award-winning Customer Satisfaction and Innovation organization has unmatched expertise in every aspect of ion implantation. With hundreds of support engineers worldwide, we have the capabilities—and the commitment—to meet your production goals and maximize the return on your Axcelis investment.
Complete lifecycle support
Our Global Support and Innovation team is there for you throughout your Axcelis relationship—from expert installation and applications support to ongoing support and repair services. We also provide comprehensive training to ensure your fab staff achieves maximum performance in the minimum time.
Performance enhancements
We’re committed to helping you keep pace with changing requirements and extending the life of your Axcelis implanter. Our Global Support and Innovation team can keep you ahead of the curve with a range of upgrades and enhancements to meet your evolving needs.
Performance enhancements available for specific platforms
| Product Line | Device Performance & Yield | Productivity / Capability | Wafer Safety | Reliability | Serviceability | Uptime |
|---|---|---|---|---|---|---|
| Purion H | ||||||
| Purion M | ||||||
| Purion XE Series | ||||||
| GSD Series | ||||||
| Paradigm Series |
Beam Angle Control Upgrade