With over 30 offices in 12 countries, Axcelis provides attentive, local service and support to semiconductor manufacturers worldwide. At our Advanced Technology Center at Axcelis world headquarters, we collaborate with customers and industry experts to develop next-generation process capabilities and applications.
108 Cherry Hill Drive
Beverly, MA 01915-1053
Phone 978-787-4000
Fax 978-787-3000
201, No.295 Zuchongzhi Road
Zhangjiang Hi-Tech Park
Pudong, Shanghai
Phone 86.21.61268600
No.15 Xingsheng Road A(JIA)
Soloon Building, Beijing Economic Development Area
Beijing 100176, China
Phone 86.10.67863300
Room C, 6F, Building A, DaAn Mansion
No.41 Youyi Road, Hexi Area
Tianjin, China 300211
Phone 86.22.58070325
Room 403, No.32 Digital Road 3
DD Port Development Zone
Dalian, China 116620
Phone 86.411.88705581
Room 307, Block G3, No.999 Gaoxin Avenue
Donghu High-Tech Development Zone
Wuhan, China 430073
5F, No.3701 North Xiang’an Road
Torch Industrial Park
Xiamen, China 361101
Zur Wetterwarte 50/Haus 337/G
01109 Dresden, Germany
Phone 49.351.7959.200
Fax 49.351.7959.281
Max-Planck-Strasse 8
85609 Aschheim-Dornach, Germany
Phone 49-351-7959-200
Fax 49-89-9043 802
Via De Capitani, 2
20041 Agrate Brianza, Italy
Phone 39.039.656.15-1
Fax 39.039.656.15.13
Zona Industriale
VIII Strada n. 5
95121 Catania, Italy
301 Takanawa Mansion, 4-8-11
Takanawa, Minato, Tokyo 108-0074, Japan
Phone 81.80.9066.8773
No 5 Green Building, 3F, 2-12-12
Hakataeikimae, Hakata-ku,
Fukuoka, Japan, 812-0011
Phone 81.92.686.8563
Fax 81.92.686.8501
#401, 160 Samsung-1ro (Seokwoo-dong, Digital Station Building)
Hwasung-si, Kyunggi-do 18450, Korea
Phone 82.31.695.8700, 8790
401 Jayoun Bldg., 517 Kangseo-dong,
Hungduk-ku, Cheongju-si,
Chungcheongbuk-do, 360-830 Korea
Phone 82-43-238-9010/9011
Suite 8, 1st Floor
Techno Centre, Kulim Hi-Tech Park
09000 Kulim, Kedah Darul Arman
Malaysia
Phone 60.4.4034686
Fax 60.4.4032686
52 Serangoon North Avenue 4
#07-01 AEM Building
Singapore 555853
Phone 65.6419.6988
Fax 65.6419.6998
4F, No. 6-5, Duxing Road,
Hsinchu Science Park 30078,
Taiwan
Phone 886.3.564.8000
Room 403, No. 61, Xilata Blvdl,
Southern Taiwan Science Park
Tainan 74145, Taiwan, R.O.C.
Phone 886.6.502.8100
17F.-1, No. 123, Sec. 3, Taichung Port Road, Xitun Dist.,
Taichung City, Taiwan R.O.C.
Phone 886.4.2358.6598
Fax 886.4.2358.5098
Axcelis Technologies, Inc.
2227 W. Pecos Rd. Bldg. B, STE 2
Chandler, AZ 85224
Phone 978.787.8700
Fax 480.722.1722
Axcelis Technologies, Inc.
5673 W. Las Positas Blvd.
Suite 205
Pleasanton, CA 94588
Phone 949.477.5160
Axcelis Technologies, Inc.
1350 Reynolds Ave.
Suite 120
Irvine, CA 92614
Axcelis Technologies, Inc.
3112 Parkview Way
Nampa, Idaho 83687
Phone 978.787.8201
Corporate Headquarters
Axcelis Technologies, Inc.
108 Cherry Hill Drive
Beverly, MA 01915-1053
Phone 978.787.4000
Fax 978.787.3000
Axcelis Technologies, Inc.
17760 Jamaica Circle
Lakeville, MN 55044
Phone 952.435.0556
Fax 952.435.0556
Axcelis Technologies, Inc.
1491 Route 52
Office 36
Fishkill, NY 12524
Phone 845.896.7025
Fax 845.896.7112
Axcelis Technologies, Inc.
19 Wood Road
Suite 200
Clifton Park, NY 12065
Axcelis Technologies, Inc.
10260 SW Nimbus Ave.
Suite M-1
Portland, OR 97223
Phone 503.968.6622
Fax 503.968.6811
Axcelis Technologies, Inc.
8900 Shoal Creek Blvd.
Suite 105
Austin, TX 78758
Phone 978.787.6120
Axcelis Technologies, Inc.
870 N. Dorothy Drive
Suite 710
Richardson, TX 75081
Phone 978.787.8600
Fax 972.690.8930
Axcelis Technologies, Inc.
10 Morse Drive
Essex Junction, VT 05452
Phone 802.879.1062
Fax 802.879.7443
Axcelis Technologies, Inc.
15191 Montanus Drive, #211
Culpeper, VA 22701
Phone 978.787.8400
Axcelis Technologies, Inc.
6720 Danforth Street
McLean, VA 22101
Phone 240.447.8403