While the semiconductor industry is always advancing to new technologies and larger wafers, fabs using mature process technologies continue to produce huge volumes of chips for a range of applications. Owners of existing 200mm fabs need solutions that enable them to make the most of their existing process technologies.

Key fab challenges:

  • Increase productivity
  • Produce varying wafer sizes
  • Accommodate a broad product mix

Axcelis solution:

We help fabs with mature process technologies address these challenges with the industry’s most advanced ion implantation solutions. Axcelis provides:

  • Commitment to 200mm fabs
  • Continuous Improvement Programs to increase fab performance and capacity, and extend the existing technology node

Learn about our Purion solutions for High CurrentHigh Energy or Medium Current, and our GSD Ovation solutions for high current and high energy batch processes