While the semiconductor industry is always advancing to new technologies and larger wafers, fabs using mature process technologies continue to produce huge volumes of chips for a range of applications. Owners of existing 200mm fabs need solutions that enable them to make the most of their existing process technologies.

Key fab challenges:

  • Increase productivity
  • Produce varying wafer sizes
  • Accommodate a broad product mix

Axcelis solution:

We help fabs with mature process technologies address these challenges with the industry’s most advanced ion implantation solutions. Axcelis provides:

  • Commitment to 200mm fabs
  • Continuous Improvement Programs to increase fab performance and capacity, and extend the existing technology node

Learn about our Purion solutions for High CurrentHigh Energy or Medium Current, or Medium Energy.