Axcelis is continually developing innovative solutions to keep your fab at the cutting edge of performance and efficiency for decades to come. Reduce obsolescence risk and lower operating costs through the life of the tool with our flexible service agreement options.

1,000+ upgrades and counting

Our Customer Solutions and Innovation organization has an expanding array of enhancements that deliver a variety of performance and efficiency benefits.

Innovation, Enhancements & Continuous Improvement

Total Cost of OwnershipProcess ReliabilityPerformance / YieldProductivityUptimeLife Extension
Bundled Upgrade Packages
Comprehensive Service Agreements
Advanced Software Solutions & Capabilities
Digital Toolbox
Product / Service Lifecycle Roadmap