Axcelis is continually developing innovative solutions to keep your fab at the cutting edge of performance and efficiency for decades to come. Reduce obsolescence risk and lower operating costs through the life of the tool with our flexible service agreement options.
1,000+ upgrades and counting
Our Customer Solutions and Innovation organization has an expanding array of enhancements that deliver a variety of performance and efficiency benefits.
Innovation, Enhancements & Continuous Improvement
Total Cost of Ownership | Process Reliability | Performance / Yield | Productivity | Uptime | Life Extension | |
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Bundled Upgrade Packages | ||||||
Comprehensive Service Agreements | ||||||
Advanced Software Solutions & Capabilities | ||||||
Digital Toolbox | ||||||
Product / Service Lifecycle Roadmap |