A key advantage of Axcelis solutions is the support team behind them. Our award-winning Global Support and Innovation organization has unmatched expertise in every aspect of ion implantation. With hundreds of support engineers worldwide, we have the capabilities—and the commitment—to meet your production goals and maximize the return on your Axcelis investment.
Performance enhancements available for specific platforms
|Product Line||Device Performance & Yield||Productivity / Capability||Wafer Safety||Reliability||Serviceability||Uptime|
|Purion XE Series|