The Axcelis Cross-Platform Hydrogen Generator Purion and Ovation GSD/HE/VHE

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BF3 Halogen Cycle is Bad for Source Life

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GeF4 Halogen Cycle is Bad for Source Life

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Hydrogen Extends Source Life and Stops the Halo-Cycle

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Accelerating Throughput

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Axcelis RF LINAC Beamline

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Microwave PEF Technology

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Click here to download whitepaper. Enhanced Life Ion Source For Germanium and Carbon Ion Implantation

Precision Doping on FinFET

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Click here to download whitepaper. Enhanced Life Ion Source For Germanium and Carbon Ion Implantation

Purion Vector Dose and Angle Control System

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Purion XE with IntelliScan – Optimized Uniformity and Productivity

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