The Axcelis Cross-Platform Hydrogen Generator Purion and Ovation GSD/HE/VHE

BF3 Halogen Cycle is Bad for Source Life

GeF4 Halogen Cycle is Bad for Source Life

Hydrogen Extends Source Life and Stops the Halo-Cycle

Accelerating Throughput

Axcelis RF LINAC Beamline

Microwave PEF Technology


Click here to download whitepaper. Enhanced Life Ion Source For Germanium and Carbon Ion Implantation

Precision Doping on FinFET


Click here to download whitepaper. Enhanced Life Ion Source For Germanium and Carbon Ion Implantation

Purion Vector Dose and Angle Control System

Purion XE with IntelliScan – Optimized Uniformity and Productivity