Spotlight On Image Sensors

Purion Shield Contamination Defense



Click here to view animation: Microwave PEF

Purion XE – Superior Contamination Control



Click here to download the presentation: Purion XE Contamination Control

Purion M – >50% Energy Consumption Advantage



Click here to download the presentation: Purion M Energy Efficiency

Eterna ELS3 Source

Purion M – Low Energy Productivity

Purion Productivity Advantage



Click here to download the presentation: The Power of Purion

Purion Eterna ELS3 Source



Click here to download whitepaper. Enhanced Life Ion Source For Germanium And Carbon Ion Implantation

OptiScan



Click here to download whitepaper. Productivity Improvements Utilizing OptiScan, Interlaced Beam Scanning, for Axcelis Purion XE Implanter

ProductivityScan