1989
- 500th high current system ships
1988
- NV-20A introduced with UNIX based distributed control system, an innovative approach that would span several generations of implanters
1985
- Eaton moves to its present location at 108 Cherry Hill Drive, previously the site of Cherry Hill Dairy Farm
- The stage was set for a major transition in technology when we shipped the world’s first 200mm implanter to IBM (NV4)
- NV-20 high current system is introduced. The system featured two Unimation Puma six axis robotic arms, which David Letterman famously used in an episode to handle viewer mail
1986
- The NV-1000 was introduced bringing LINAC based acceleration to commercial semiconductor manufacturing. This technology would skyrocket nine years later
- The NV-200 Oxygen implanter was introduced, ushering in an age of commercial SOI production
1984
- NV-10-40 introduced
- NV-6200 introduced
- Banner year with record number of shipments and five separate facilities (included converted hockey rink) with shuttle service connecting the sites
1983
- A milestone year for the young company, Nova shipped its 100th system
- Datalock introduced, first computer controlled supervision, another industry first
- AT4 introduced, automating the wafer loading process
- NV-10-160 introduced, and the single charged energy went from 80keV to 160keV
1981
- NV-10-80 introduced, raising the energy to 80 keV
- NV-3206 introduced with industry’s first 150mm capability and throughputs of 220 wph
- Eaton completes Acquisition of Nova
- ‘Father of Ion Implantation – The Early Years’ by Peter Rose and Geoff Ryding
- ‘Nova – A History’ by Peter Rose
