• Purion XEmax introduced, designed for emerging, high performance image sensor applications. Features dual LINAC design with patented Boost Technology™ for the highest energies up to 15 MeV
  • Purion Dragon introduced, designed for leading-edge applications, especially in low energy high dose
  • Purion H200 introduced, offering high energy, high current capability targeting the power device market


  • Purion Power Series introduced, with unique features and process control capabilities, including the platform’s silicon, thin silicon and silicon carbide capability, which are enabling for the power device market


  • Purion H 80 introduced, extending the energy range of a conventional high current implanter
  • Purion VXE introduced featuring a 14-stage LINAC with extended multiple charge capabilities, delivering energies up to 8 MeV


  • Purion M SiC introduced
  • Purion EXE introduced featuring a 12-stage LINAC with energies up to 5.25 MeV


  • Purion H introduced, featuring a unique scanned-spot-beam architecture and five filter beamline design


  • Purion XE introduced, featuring a 12-stage LINAC with energies up to 4.5 MeV


  • With shipment of Purion M, the Purion Platform is born… and set a new foundation for Axcelis product development


  • Optima XEx introduced, the next evolution of high energy systems