• Purion XEmax introduced, designed for emerging, high performance image sensor applications. Features dual LINAC design with patented Boost Technology™ for the highest energies up to 15 MeV
• Purion Dragon introduced, designed for leading-edge applications, especially in low energy high dose
• Purion H200 introduced, offering high energy, high current capability targeting the power device market

• Purion H 80 introduced, extending the energy range of a conventional high current implanter
• Purion VXE introduced featuring a 14-stage LINAC with extended multiple charge capabilities, delivering energies up to 8 MeV

• Purion H introduced, featuring a unique scanned-spot-beam architecture and five filter beamline design

• With shipment of Purion M, the Purion Platform is born… and set a new foundation for Axcelis product development