세 가지 기술, 하나의 강력한 플랫폼
차세대 Purion 플랫폼에 기반한 Axcelis 이온 주입기 제품군은 최소한의 비용으로 초정밀, 고순도 및 높은 생산성(Purity, Precision and Productivity)을 제공합니다.
Axcelis의 혁신적인 소스 테크놀로지는 불소 기반 dopant와 H2가스를 함께 사용하여 source 내부에 glitch를 줄이고 텅스텐 금속 오염을 억제하는 동시에 소스 수명은 늘림으로써 주입기의 성능을 향상시킵니다.
Axcelis는 정밀도, 순도 및 생산성(Purity, Precision and Productivity)을 개선하여 반도체 제조사와 관련한 어려움들을 해결할 수 있습니다. 지금 상담해보세요!
© 2023 Axcelis
All rights reserved.
본사
Axcelis Technologies
108 Cherry Hill Drive
Beverly, MA 01915-1088
Phone: 978.787.4000
Fax: 978.787.3000
주요 지사
China
Germany
Italy
Japan
Korea
Malaysia
Singapore
Taiwan
United States
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