• 500th Purion ships. The Purion platform is now capable of 18 configurations across 9 product backbones.
  • 45th anniversary of the company’s founding
  • The Axcelis Logistics Center opens in Beverly, MA.  The 95,600 square foot center is designed to optimize Axcelis’ warehouse and logistics operations and provide flex capacity for our manufacturing operations


  • Axcelis Asia Operations Center opens in South Korea. The new clean manufacturing facility is designed to add capacity and drive customer satisfaction for Asia Pacific customers


  • Purion EXE Power Series SiC and Purion H200 Power Series SiC introduced. These include mechanical clamp technology for up to 650°C implant temperatures, active pre-heat, and active post cool stations
  • GSD Ovation introduced, extending the GSD series platform’s production into the future


  • Purion XE and Purion VXE Power Series introduced, designed for aluminum implantation for high volume power devices. They feature either 150mm SiC wafer handling or 200mm thin Si wafer handling