2023

  • 500th Purion ships. The Purion platform is now capable of 18 configurations across 9 product backbones.
  • 45th anniversary of the company’s founding
  • The Axcelis Logistics Center opens in Beverly, MA.  The 95,600 square foot center is designed to optimize Axcelis’ warehouse and logistics operations and provide flex capacity for our manufacturing operations

2022

  • Axcelis Asia Operations Center opens in South Korea. The new clean manufacturing facility is designed to add capacity and drive customer satisfaction for Asia Pacific customers

2021

  • Purion EXE Power Series SiC and Purion H200 Power Series SiC introduced. These include mechanical clamp technology for up to 650°C implant temperatures, active pre-heat, and active post cool stations
  • GSD Ovation introduced, extending the GSD series platform’s production into the future

2020

  • Purion XE and Purion VXE Power Series introduced, designed for aluminum implantation for high volume power devices. They feature either 150mm SiC wafer handling or 200mm thin Si wafer handling