Damage Engineering on Purion XE High Energy Ion Implanter (IIT 2014)
Contamination Control in the Purion Platform Ion Imoplanters (IIT 2014)
Photomodulated Reflectance Measurement Technique For Implantation Tilt Angle Monitoring
Super Activation of Highly Surface Segregated Dopants in High Ge Content SiGe Obtained by Melt UV Laser Annealing
Materials Modification Implants for Dry Etch Process Optimization
Acceleration of 4+ Ions in an RF Linac Accelerator
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