NV-GSD is introduced and would go on to become the most successful high current implanter in the history of the industry with >600 units shipped in total, most of which are still in production. Featured unique Gyroscopic end station, the industry’s first two-axis tilt capability, for advanced processes and throughput of >200wph
NV-1002 high energy system introduced
NV-6200AV is introduced, with innovative platen design, rotation during processing and multiple tilt angles from 0 to 60 degrees
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