1998
- Introduced new 300mm implant product suite. including the MC3 for medium current, the ULE3 for ultra-low energy and the HE3 for high energy applications
- HE3 Ships to first 300mm fab
- Implanter Network Options introduced, the industry’s first program to provide a state-of-the-art, cost-effective method of remotely monitoring and operating ion implantation equipment –precursor to remote diagnostics systems.
