2000
- Eaton SEO is now Axcelis Technologies. Eaton corporation files registration statement to spin off Semiconductor Equipment Division, as Axcelis Technologies, Inc, in an IPO. Eaton completes total spin off of Axcelis Technologies in December.
- NV-8250HT Introduced, high-tilt, medium-current ion implanter introduced, designed for 0.18µm and below processes
