2025
- Launched the next generation Eterna ELS7, which significantly improves source life and beam stability.
- Launched MUSIC, MUltiple Step Implant Capability, an innovative, unique process capability to implant multiple energy recipes in a single implant step – significantly boosting productivity and yield.
- Launched the Purion Power Series+ platform, designed specifically to enable improved device performance and increase productivity for next generation power devices, including emerging superjunction architectures.
- Launched the GSD Ovation ES, which enables best-in-class high current batch implant capability for engineered substrate applications.
