1979
- Nova ships the first NV-10-60 from its latest facility, an abandoned bowling alley. The NV-10-60 is the industry’s first commercial high current implanter. Revolutionary design features include sliding seal technology, bi-directional mechanical scanning, superb dose uniformity, cooled disks, simple operation.
The system featured:
Exchange Arms
Two disks and automated exchange arms allowed for higher throughput, though wafers were still hand loaded onto the disksDose Controller
Use of a dosimetry slot in the disk allowed for real time dose control, the velocity was proportional to 1/RSlot Disk
This basic concept was carried forward successfully for many generations of NV-10, GSD, HE, HE3, HC3, Ultra, and Paradigm - Geoff Riding receives SEMI award for design of NV-10
