Resources

2025 Axcelis Sustainability Report

Axcelis Board of Directors

Axcelis Form 10-K

Axcelis Form SD and Conflict Mineral Report

Axcelis Proxy Statement

Axcelis Leadership Profile

Equal Employment Opportunity Report EEO1

Executive Compensation Clawback Policy

California Supply Chain Disclosure

Corporate Social Responsibility Policy

Environmental Health Safety Management System

Ethical Business Conduct Policy

EU RoHS position

Governance Guidelines

Insider Trading Policy

ISO 45001 Certificate

ISO 14001 Certificate

Supplier Code Of Conduct

2019 REACH FAQ for Suppliers