The following are trademarks of Axcelis Technologies, Inc. Registered trademarks are designated by ® and unregistered trademarks are designated by a ™. This list may not be a presently comprehensive list of all of Axcelis Technologies, Inc., trademarks.
- Axcelis®
- Purion Power Series™
- Purion H200™
- Purion M™
- Purion H™
- Purion XE™
- Purion EXE™
- Purion VXE™
- Purion VXE LT™
- Purion XEmax™
- Purion™
- GSD™
- Ovation™
- GSD/E2™
- GSD/200™
- GSD/200E™
- GSD/200E2 ™
- GSD/HE™
- GSD/VHE™
- HE/VHE™
- Optima™
- Autotune™
- Boost Technology™
- Eterna™ ELS
- ELS™
- Duo™
- Halo™
- Active AI™
- Vector™ Dose and Angle Control System
- Shield™ (As in Purion Contamination Shield™)
- MUSIC™
- IdealScan™
