Upgrades

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Eterna ELS3 Ion Source and SPECTRA Solifex Boosts Source Life by 300-500%

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Click here to download whitepaper:
Enhanced Life Ion Source For Germanium and Carbon Ion Implantation 

Beam Angle Control Upgrade

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Click here to download the whitepaper: 
Beam Angle Control Kit for Angle Sensitive Implantation 

Axcelis Thin Wafer Handling Upgrade

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Click here to download the presentation: 150mm Thin Wafer Upgrade 

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