Productivity

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ProductivityScan

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Axcelis - ProductivityScan

OptiScan

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Click here to download the white paper:
Productivity Improvements Utilizing OptiScan, Interlaced Beam Scanning, for Axcelis Purion XE Implanter 

Purion Eterna ELS3 Source

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Click here to download the whitepaper:
Enhanced Life Ion Source For Germanium And Carbon Ion Implantation 

Purion Productivity Advantage

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Click here to download the presentation: The Power of Purion

Eterna ELS3 Ion Source and SPECTRA Solifex Boosts Source Life by 300-500%

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Click here to download the whitepaper:
Enhanced Life Ion Source For Germanium and Carbon Ion Implantation

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