STANDARD CLEANING AND DRY STRIP
Axcelis is a recognized leader in FEOL and BEOL plasma cleaning and dry strip technology. Our systems are known worldwide for providing innovative process solutions, exceptional reliability and low cost of ownership. When it comes to cleaning and dry strip technology, each technology node brings new challenges for process engineers to overcome. New materials, device architectures, and plasma cleaning applications require a diverse set of process capabilities. That's why Axcelis offers several products to address the full range of your application requirements.
The Axcelis Integra RS and RapidStrip 320 systems provide industry leading cost of ownership for oxygen-based dry strip and the best removal capabilities for heavily implanted resist.