ACCELERATING INNOVATION

At Axcelis, we make semiconductor manufacturing more productive every day. The company's product offering comprises a powerful suite of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process.  Chip manufacturers around the globe rely on Axcelis' tools and process expertise to form the transistors that are at the core of every semiconductor device. More than 3000 of our products are in use worldwide.

Axcelis' suite of ion implanters includes both single and multi-wafer processing capabilities for mid dose, high dose and high energy applications. Most recently, Axcelis launched the Purion platform, the industry’s first complete implant product solution designed specifically for advanced planar and 3D devices while providing the most flexible and productive manufacturing capability for your fab.