ACCELERATING INNOVATION

At Axcelis, we make semiconductor manufacturing more productive every day. The company's product offering comprises a powerful suite of manufacturing technologies for ion implantation and cleaning/dry strip processes, two of the most critical steps in IC manufacturing. Chip manufacturers around the globe rely on Axcelis' tools and process expertise to form the transistors that are at the core of every semiconductor device. More than 4000 of our products are in use worldwide.

Axcelis' suite of ion implanters includes both single and multi-wafer processing capabilities for mid dose, high dose and high energy applications. Most recently, Axcelis launched the Optima platform, the first family of implanters specifically designed to give users complete, extendible implant applications coverage in and beyond the 22nm technology node. Axcelis' cleaning/dry strip platform, the Integra, provides highly differentiated process technology to meet the full range of applications requirements: from the highest productivity, non-oxidizing solutions for 22nm and below logic and memory devices, to single chamber, small substrate size applications in the MEMS, LED, and chip packaging markets.