CURING

Axcelis offers three configurations of the RapidCure system, including the RapidCure CE, RapidCure FC and RapidCure PS, to give customers the flexibility to cover a broad range of charge erase, film curing and photostabilization applications.

• RapidCure FC: The RapidCure FC is a standalone film curing system designed specifically for strengthening, enhancing and/or modifying the mechanical and electrical properties of advanced semiconductor films. The FC configuration is ideally suited for some of today's most sophisticated applications, including low-k and silicon nitride film curing, while maintaining the flexibility to support UV annealing and charge erasure needs.
• RapidCure CE: The RapidCure CE platform offers a fast, cost-effective method of removing yield-damaging charge build-up in devices. A standalone system, the tool offers the industry's shortest charge erasure times for both front- and back-end-of-line environments.
• RapidCure PS: The RapidCure PS platform is a standalone photostabilization system for curing photoresist features prior to etch processing. The PS configuration cross-links exposed photoresist, creating a robust polymer layer that yields precise and consistent critical dimensions wafer after wafer.