CURING AND THERMAL PROCESSING

Axcelis' legacy product offerings include both Rapid Thermal Processing (RTP) systems as well as UV Curing systems.

Summit XT: The system utilizes the company's patented hot wall heating technology to produce a stable, steady state environment in near equilibrium with the wafer, to achieve exceptional uniformity and repeatability. The system is ideally suited for applications where a reduced thermal budget is critical.

RapidCure: Axcelis offers three configurations of the RapidCure system, including the RapidCure CE, RapidCure FC and RapidCure PS, to give customers the flexibility to cover a broad range of charge erase, film curing and photostabilization applications. The company's proprietary UV lamp design and in-house bulb manufacturing capabilities enable Axcelis to tailor processes to each customer's application need.