INTEGRA RS

The Integra RS is the third generation, multi-chamber, plasma dry strip system from Axcelis, offering unparalleled productivity and unmatched process performance. The system employs plasma technology qualified in 28nm memory and logic manufacturing, on a production proven wafer handling platform.

• A New Benchmark for High Productivity. Available with 4 or 6 chambers, Integra RS offers the highest productivity available for both short and long processes, on a modular platform that allows production to continue as portions of the tool are off-line for maintenance.
• Proven in 32nm Production. Integra RS plasma source and process chamber designs are optimized to provide clean plasma strip results while meeting substrate damage requirements of advanced technology nodes in memory and logic production.
• Extendability for Advanced Materials. The unique load lock design of Integra RS cools processed wafers in an inert environment to minimize oxidization; critical to stripping photoresist over ultra-shallow junctions, phase change memory materials, bit line and capacitor materials.
• Network Design for High Speed Data Transfer. Integra RS incorporates a high speed network with integrated data server, allowing transfer of process and diagnostic data at up to 100 Hz to fab APC servers, and simultaneous communication with Host Automation. Never before has so much diagnostic data been available in real time from a dry strip tool.