PLASMA CLEANING

Axcelis is a recognized leader in FEOL and BEOL plasma cleaning and dry strip technology. Our systems are known worldwide for providing innovative process solutions, exceptional reliability and low cost of ownership.When it comes to cleaning and dry strip technology, each technology node brings new challenges for process engineers to overcome. New materials, device architectures, and plasma cleaning applications require a diverse set of process capabilities. That's why Axcelis offers several products to address the full range of resist strip, plasma treatment, and polymer removal applications.

  • Integra ES, providing the industry's only full-time, non-oxidizing, plasma strip and clean capability.
  • Integra RS and RapidStrip 320 systems, providing industry leading cost-of-ownership for oxygen-based dry strip and the best removal capabilities for heavily implanted resist.
  • Rapidstrip 210 systems, providing resist removal, surface treatment, and light etch, in the smallest available footprint, for 3-inch to 8-inch substrates.

Together, these products deliver highly differentiated process technology to meet the full range of applications requirements, from the highest productivity, non-oxidizing solutions for 32nm and below logic and memory devices, to single chamber, small substrate size applications in the MEMS, LED, and chip packaging markets.