ADVANCED CLEANING/DRY STRIP
Axcelis' innovative advanced cleaning/dry strip product line is the newest generation plasma dry strip platform designed to address next generation device manufacturing down to the 22nm node and below. The platform delivers the most advanced non-oxidizing strip capabilities on the market today for next generation logic and memory devices. Built on the production-proven Integra platform, the Integra ES is the only system designed to run advanced processes effectively and efficiently in a high volume manufacturing environment.
- Integra ES, providing the industry's only full-time, non-oxidizing, plasma strip and clean capability with unprecedented manufacturing flexibility and speed.