Integra RS is the 3rd generation, multi-chamber plasma dry strip system from Axcelis, offering unparalleled productivity and unmatched process performance. The system employs plasma technology qualified for 55nm and below production in memory and logic manufacturing, on a production proven wafer handling platform. A New Benchmark for High Productivity: Available with 4 or 6 chambers, Integra RS offers the highest productivity available for both short and long processes, on a platform that allows production to continue as portions of the tool are down for service. Proven in 55/45nm Production: Integra RS plasma source and process chamber designs are optimized to provide clean plasma strip results while meeting substrate damage requirements of advanced technology nodes in memory and logic production. Extendability for Advanced Materials: The unique load lock design of Integra RS cools processed wafers in an inert environment to minimize oxidization; critical to stripping photoresist over high-K/metal gate, phase change memory materials, and trench or stacked capacitors. Software Design for High Speed Data Transfer: Integra RS incorporates a high speed network with integrated data server, allowing transfer of process and diagnostic data at up to 100 Hz to fab APC servers, and simultaneous communication with the Host Automation system. Never before has so much diagnostic data been available in real time from a dry strip tool.