ARTICLES

Axcelis in the news

Read about Axcelis innovations in recent publications and breaking news.

Integration of High Dose Boron Implants - Modification of Device Parametrics through Implant Temperature Control
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Angle Performance on the Optima XE High Energy Implanter
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Study of Controlled Oxygen Diffusion Approaches for Advanced Photoresist Strip
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Extreme Outsourcing: Axcelis' New Manufacturing Strategy Aims to Lower Costs, Speed Time to Market
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