Support Programs

Success Defined Your Way

Axcelis offers a comprehensive range of support services to help you maximize uptime, lower cost of ownership and improve equipment efficiency. We'll work with you to select solutions that help you define success on your terms, so you have exactly the support you need where and when you need it most.

Below is an example of some of these options:

1st Silicon Engineer – Dedicated to helping you achieve your first silicon goals.

At Axcelis' Advanced Technology Center in Beverly, Massachusetts, our onsite IC technology experts will provide your technicians and engineers with the focused, hands-on training they need to keep your implant processes up and running with minimum downtime and optimal productivity.

Maximize Uptime and Productivity

Axcelis offers a wide array of programs to provide customers with high quality spare parts and consumables, where and when you need them.  We maintain spare parts depots around the globe, to ensure rapid response and maximum uptime.  If you have unique requirements, we offer flexible programs to customize your solutions to meet your needs.

Performance Enhancements

More than 1,000 Axcelis upgrades are available to increase your productivity, improve yield, reduce cost of ownership and extend your system's lifecycle. Every enhancement is designed to perfect your process and maximize the return on your capital investment. Below is a sample of some of these. For more information on these upgrades and many more, contact your local service team.

Success on Your Terms

The Axcelis Global Support Solutions mission is simple: to meet your production goals by optimizing the performance of Axcelis equipment in your fab.

With a team of over 900 strong worldwide, we're ready to help you develop the solutions that enable you to meet and exceed your business goals - from boosting uptime to improving the bottom line. Tell us your definition of success and we'll deliver the innovation you need to make it a reality.

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