News and Events

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ARTICLES

Axcelis in the news

Read about Axcelis innovations in recent publications and breaking news.

Integration of High Dose Boron Implants - Modification of Device Parametrics through Implant Temperature Control
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EVENTS

Visit Axcelis at these leading-edge global expositions and seminars to speak with our experts and learn about our latest products and how they can help you reach new levels of productivity and technical performance.

SEMICON Korea
COEX, Seoul, Korea
Booth #5504

January 27-29, 2016

http://www.semiconkorea.org/en/

 

News

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