Many customers are surprised to learn that Axcelis offers more than 1,000 upgrades for its large installed base of 150mm, 200mm, and 300mm high current and high energy batch implanters. We’ve always been committed to delivering long term value to our customers, and a key part of our commitment is to develop evolutionary products that allow for the continuous improvement of your Axcelis installed base.
The following series of 'Conversation With A Scientist' and '60
Second Update' videos feature membersof the Axcelis team providing
insights on ion implantation technology trends, and methods you can use
to optimize your performance. For more information on any of these
topics or to request an in depth presentation at your organization,
please contact us.
Axcelis introduced wafer temperature control as a process variable for matching implanter platforms over 10 years ago. Now, chip manufacturers are investigating reduced temperature implants to control leakage and improve activation. This article investigates the limits of cold implants as far as l
Download your complimentary copy of these unique applications from
Axcelis, a world leader in ion implantation technology. These tools
will give you insight into your implant process to optimize your
performance and your productivity.
Ion Calculator: Reverse Polish calculator with
implant utilities, periodic table, mass aliasing, isotopes, physical
constants, conversions and more. Download now