Knowledge Center

By Olivia Keller, Product Marketing Manager

Many customers are surprised to learn that Axcelis offers more than 1,000 upgrades for its large installed base of 150mm, 200mm, and 300mm high current and high energy batch implanters. We’ve always been committed to delivering long term value to our customers, and a key part of our commitment is to develop evolutionary products that allow for the continuous improvement of your Axcelis installed base.

The following series of 'Conversation With A Scientist' and '60 Second Update' videos feature membersof the Axcelis team providing insights on ion implantation technology trends, and methods you can use to optimize your performance. For more information on any of these topics or to request an in depth presentation at your organization, please contact us.

By Dr. Leonard Rubin, Senior Scientist

By Dr. Leonard Rubin, Senior Scientist

By Michael Ameen, Ph.D., Chief Process Scientist

Axcelis introduced wafer temperature control as a process variable for matching implanter platforms over 10 years ago.  Now, chip manufacturers are investigating reduced temperature implants to control leakage and improve activation.  This article investigates the limits of cold implants as far as l