Global Network, Local Service
Axcelis' specialized field service organization encompasses a worldwide network of highly skilled support engineers dedicated to optimizing the performance and operation of Axcelis equipment. With factory-trained experts located all around the world, our offices are also strategically linked to locally stocked parts depots, providing critical parts with minimum delay to our regional full service repair centers.

Find a service office near you:

Arizona
2227 W. Pecos Rd. Bldg. B, STE 2
Chandler, AZ 85224
Phone: 480.722.9003
Fax: 480.722.1722


California
47889 Fremont Blvd.
Fremont, CA 94538
Phone: 510.979.1970
Fax: 510.979.1971


1360 Reynolds Ave.
Suite 106
Irvine, CA 92614
Phone: 949.477.5160
Fax : 949.477.5166


Idaho
2149 E. Summersweet Dr.
Boise, ID 83716
Phone: 978.787.8200
Fax: 208.343.6712


Indiana
251 N. 600 E
Greentown, IN 46936
Phone/Fax: 765.628.7392


Massachusetts
108 Cherry Hill Drive
Beverly, MA 01915-1053
Phone: 978.787.4000
Fax: 978.787.3000


Minnesota
17760 Jamaica Circle
Lakeville, MN 55044
Phone: 952.435.0556
Fax: 952.435.0556


New York
1491 Route 52
Office #36
Fishkill, NY 12524
Phone: 845.896.7025
Fax: 845.896.7112


Oregon
10260 SW Nimbus Ave.
Suite M-1
Portland, OR 97223
Phone: 503.968.6622
Fax: 503.968.6811


Texas
1901 W. Braker Lane, Suite 400
Austin, TX 78758
Phone: 512.977.7600
Fax: 512.977.7699

870 N. Dorothy Drive
Suite 706
Richardson, TX 75081
Phone: 972.690.8914
Fax: 972.690.8930


Vermont
16 Morse Drive
Essex Junction, VT 05452
Phone: 802.879.1062
Fax: 802.879.7443


Virginia
8140 Flannery Ct
Manassas, VA 20109
Phone: 978.787.8400
Fax: 571.921.1496

6720 Danforth Street
McLean, VA 22101
Telephone# 240-447-8403

China
666 Gubei Road 12th Floor,
Kirin Plaza Building
Changning District,
Shanghai, China 200336
Telephone # 86-21-6126-8600
Fax # 86-21-6119-7300

ZhangJiang Office
200 Nuidun Road, 3B, Building #1
Zhangjiang Hi-Tech Park
Pudong, Shanghai 201203

Beijing Office
No.2 Tongji Middle Road
Soloon Building, Beijing Economic Development Area
Beijing, PRC China 100176
Phone: 86.10.67863300

Tianjin Office
Room 504 No.41 DaAn Mansion
Youyi Road, HeXi Area
Tianjin 300211

France
Axcelis Technologies, S.A.R.L.
La Batie - 33 allée de Champrond
38330 Saint-Ismier
France
Telephone# +33-4-76-72-23-70
Fax# +33-4-76-72-23-88

Germany
Axcelis Technologies, GmbH
Zur Wetterwarte 50/Haus 337/G
01109 Dresden, Germany
Telephone# 49-351-7959-200
Fax # 49-351-7959-281

Italy
Axcelis Technologies, S.r.l.
Via De Capitani, 2
20041 Agrate Brianza, Italy
Telephone# 39-039-656-15-1
Fax # 39-039-656-15-13

Japan
Toda Technology Services Co., LTD
World Trade Center 23F
2-4-1 Hamamatsucho, Minato-Ward
Tokyo 105-6123
Japan
Telephone# 81-3-5425-7707
Curing, Cleaning, Rapid Thermal Product Sales

Korea
Suwon Office
8F, ILBUNJI Plaza
#1024-16 Youngtong-Dong, Youngtong-gu
Suwon-si, Kyunggi-do
442-470 Korea
82.31.206.0020

Icheon Office
#109 Ichon-Town #692-10 Ami-ri
Bubal-eup, Ichon-si
Kyunggi-do, 467-866 Korea
Phone: 82.31.636.3821/3822

Malaysia
45A, First Floor, Taman
Manggis 2, Jalan Kilang
Lama, 09000 Kulim, Kedah
Malaysia
Phone: 02.04.490.8253

Axcelis Technologies, Inc.
Suite 8, 1st Floor
Techno Centre, Kulim Hi-Tech Park
09000 Kulim, Kedah Darul Arman
Malaysia
Telephone# 60-4-4034686
Fax# 60-4-4032686

Singapore
25 Serangoon North Avenue 5
#05-10/11 Keppel Digihub
Singapore 554914
Phone: 65.6419.6988

Taiwan
Hsinchu Office
No. 51 Park Ave. II, SBIP
Hsinchu 300, Taiwan, R.O.C.
Telephone# 886-3-564-8000

Tianan Office
5F, No. 8, Da-Yeh 1st Rd
Tainan Science-Based Industrial Park
Tainan, Taiwan
Telephone# 886-6-502-8200

Taoyuan Office
1F, No. 50, Xing-Hua Five Street
Guei-Hsan Hsiang, Taoyuan 333
Taiwan, R.O.C.
Telephone# 886-3-397-3682

Taichung Office
No. 40 Fu-ya Rd.
Taichung, Taiwan R.O.C.
Telephone# 886-4-2463-1688

Back to Top