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4 Ways To Enhance Your Productivity and Process Performance in 2013

By Olivia Keller, Product Marketing Manager

Many customers are surprised to learn that Axcelis offers more than 1,000 upgrades for its large installed base of 150, 200mm, and 300mm high current and high energy batch implanters. We’ve always been committed to delivering long term value to our customers, and a key part of our commitment is to develop evolutionary products that allow for the continuous improvement of your Axcelis installed base. Our goal is to increase implanter productivity, improve yield, reduce cost of ownership, and extend your system's lifecycle to maximize the return on your capital investment. This is especially important when Fab floor space is scarce, or during downturns when capital budgets are not robust. Below is a sample of some of our most popular upgrades as well as some new ones.

High Performance End Station Upgrade
This upgrade was designed to significantly enhance system productivity and defectivity performances for the GSD high current and high energy platforms, as well as SEN implanters. Major design improvements are delivered in the in vacuum handling area that reduce transfer time for increased productivity, improve wafer handling precision and repeatability for minimal defectivity and extend maintainability, and simplify practices. Key assemblies of the upgrade: a wafer chuck and a dual cam arm that are Quality proven prior shipment. Customers using this upgrade in high volume manufacturing are reporting a boost in productivity, higher MTBF, and measurably reduced particulate levels and enhanced yield.