5 Essential Upgrades for 200mm That You Should Consider Now

It has been a strong year for the 200mm implant market as growth in mobile applications and the Internet of Things drive demand for more capable and cost effective devices.  Many fabs are at capacity, and in search of upgrades that bring added productivity and performance. The solutions below deliver customer inspired upgrades for long term value. Our goal is to increase implanter productivity, precision and capability with the aim of reduced cost of ownership.  Below are 5 of the most successful upgrades that are proven to satisfy customer productivity and cost of ownership needs.

1. GSD High Performance End Station
    Quickly Adds Capacity and Reduces CoO
Many of our customers who need to ramp capacity and are four-walled constrained have requested a solution that can increase capacity as well as improve their process.  The GSD High Performance End Station (HPES) upgrade was developed specifically to address these needs.  Customers using this upgrade in production report up to a 17% increase in wafers implanted per day, and up to a 53% reduction in defectivity.  The HPES is a hardware and software integrated productivity upgrade. It combines advanced wafer handling hardware with low g-force mechanics, to improve the ratio between implant and non-implant time by eliminating up to 50% of in-vacuum wafer handling time. This upgrade is available on nearly all GSD models and is the fastest and most cost effective way to quickly add capacity.

Customer data shows an average of 10.7% increase in productivity and up to a 53% reduction in defectivity. 

Productivity Increase

Particle Performance

2. Beam Angle Control Upgrade
    Improves Batch to Batch Device Repeatability
Customers requested improved beam angle repeatability to enable process transfer capability.  The solution is the batch Beam Angle Control upgrade which demonstrates improved implant angle precision by nearly one order of magnitude; achieving ±0.15⁰ implant angle control in both the alpha and beta planes. The BAC provides the advantage of tool-to-tool beam angle matching, when installed on multiple systems across fabs. The upgrade measures and corrects for beam angle error and for minor end station mechanical misalignments. The improved precision and repeatability of the BAC enables a multiline implant to become a single step implant in some cases, further saving tool owners time and money.

The upgrade has been successfully installed at key foundry and memory device manufacturers. From a technical perspective, the BAC upgrade offers a capability that can only be matched by purchasing a late production single wafer implanter. 

The BAC upgrade improves batch to batch parametric variation and premium die yield.

3. Burnthrough with Selfcheck
    Eliminates Wafer Scrap
After a recent wafer scrap event, caused by human technical oversight, we were asked to develop a failsafe hardware and software upgrade to avoid the possibility of future occurrences. The burnthru with self check provides critical wafer safety sensing capability; protecting against wafer loss when accidental run-to-fail occurs on the flag faraday graphite.  The new design features a fulltime ‘burnthru present’ feedback monitoring loop. The hardware and software improvements provide an in-situ guard against wafer damage. When burnthru is detected, the system stops the beam from entering the beamline, preventing certain striping damage to wafers. A secondary benefit of the upgrade is the elimination of wire fatigue and vacuum feed through failure and the related wafer scrap. Customers implementing this upgrade understand that it only takes preventing one failure event to realize its value.

4. GSD Solaris with V6 Controller Upgrade
    Your Gateway to Greater Productivity and Process Control
Customers have requested ongoing improvements in wafer security, and the compatibility that comes with leading edge software design.  The Solaris control system extends the serviceable life of your implanter while providing quantifiable process security and control features.  The Solaris control system is the most significant “gateway” upgrade that Axcelis offers. Over 60% of Axcelis’ legacy systems have installed this upgrade with production proven results. 

The V6 cell controller, which replaces the older 177 and 133 controllers, serves as the heart of the control system. The Solaris operating system combined with the V6 enables compatibility with the latest generation of host command capabilities current process and 15 years of process security features. Key benefits include enhanced wafer safety, robust remote accessibility, improved data integrity and storage, rapid customer support access, and reduced downtime failures. Once installed, it provides forward compatibility with upgrades that can increase productivity, improve implant precision and reduce process risk.  

5. Powerdose with Optimized Fast Scan
    Enhance Process Assurance and Wafer Protection
PowerDose is the most important process improvement upgrade you can make to your GSD installed base. It significantly enhances process assurance and provides compatibility with 20 years of key technology enhancements focused on wafer protection, defect reduction and productivity improvements.

It includes Optimized Fast Scan which was specifically designed to enhance device yield by preventing broken poly lines and ballistic particle damage. The Optimized Fast Scan regulates disk spin speed to reduce stress on poly lines. Customers using this in production have reported up to a 73% reduction in stress induced poly knockdown damage and up to a 4.2X reduction in particles on the wafer.

The PowerDose upgrade also includes the Beam Spectrum Analyzer which reduces the risk of wafer scrap by detecting variations in beam current and preventing the related dose shift.  This upgrade greatly reduces process risk and alerts the user to conditions that lead to dose shift, builds in protections for product yield and productivity.

To receive more detailed information on these upgrades and many others, please contact your Axcelis account manager.