The Axcelis Connection

The Axcelis Connection is your link to a world of valuable information related to your Axcelis equipment.

Through the Axcelis Connection you can:

  • Manage consumable parts through Axcelis' highly successful Spares Management and Replenishment Tracking program, SMARTâ„¢.
  • View detailed, timely product information in the Axcelis Technical Library.
  • Search REACH database to find Substance(s) of Very High Concern (SVHC) as defined by the EU Regulation (EC) NO1907/2006 of the European Parliament and of the Council of 18 December 2006 concerning the Registration, Evaluation, Authorization and Restriction of chemicals (REACH).
  • Search the Axcelis China RoHS database to see a Declaration of Material Content as defined by the People's Republic of China, Electronic Industry Standard SJ/T11364-2006.


Axcelis Ethics Policy and Reporting of Concerns.

Axcelis seeks to promote honest and ethical conduct, including the avoidance of actual or apparent conflicts of interest between personal and professional relationships, and compliance with applicable governmental rules and regulations.

Reporting of Concerns:
Axcelis encourages its customers to report any concerns regarding ethics or legal compliance at Axcelis:

  • You may speak in person, telephone, mail or e-mail our General Counsel, Lynnette Fallon (978-787-4120 or;
  • You may contact another member of senior management, including our Chief Executive Officer or the Chief Financial Officer; or
  • You may telephone a dedicated voicemail box at 978-787-9998.

Any reporting may be done anonymously, although we encourage you to provide sufficient information (including contact information) to allow us to undertake a productive investigation of the matter. All investigations will be handled promptly and in as confidential a manner as possible without compromising the effectiveness of the investigation.