The Axcelis Connection is your link to a world of valuable information related to your Axcelis equipment.

Through the Axcelis Connection you can:

  • View detailed, timely product information in the Axcelis Technical Library.
  • Search REACH database to find Substance(s) of Very High Concern (SVHC) as defined by the EU Regulation (EC) NO1907/2006 of the European Parliament and of the Council of 18 December 2006 concerning the Registration, Evaluation, Authorization and Restriction of chemicals (REACH).
  • Search the Axcelis China RoHS database to see a Declaration of Material Content as defined by the People’s Republic of China, Electronic Industry Standard SJ/T11364-2006.