ENVIRONMENTAL STEWARDSHIP

At Axcelis Technologies, we are committed to taking an active part in protecting the health and safety of our most valuable assets - our employees and customers. In addition, Axcelis is committed to protecting the environment and the public health of the communities in which we operate. Axcelis has been certified to the ISO 14001 Environmental Management System standard since 2000 and we maintain a comprehensive environmental management system that defines and tracks site performance to environmental, health and safety goals. The company is also actively involved in SEMI's Global Care, a semiconductor and equipment industry initiative designed to establish a framework on which the diverse membership of SEMI can build and strengthen commitment to the environment, health and safety.

• Our ISO 14001 Management System and Policy
• Our Performance

ISO 14001 Environmental Management System

Our Environmental policy states:

• Axcelis Technologies is committed to protecting the environment, and the public health of the communities in which we operate.
• We are committed to compliance with all environmental regulations, legislation, and other environmental requirements applicable to our business and its environmental aspects.
• We strive to conserve natural resources and to continually improve our environmental systems.
• We set appropriate, achievable objectives and targets for the prevention of pollution.
• We periodically review our environmental objectives and targets.
• We maintain records regarding environmental policies, procedures, and performance.

The Axcelis Environmental Leadership Team provides oversight to ensure that Axcelis' environmental objectives, targets and goals, and Axcelis' Environmental Management System minimizes the environmental impacts of our activities, products and services. The Environmental Policy is communicated to all personnel working at Axcelis' manufacturing facilities and is available to the public.

Our EHS Performance

2011 Environmental Health and Safety Goals and Objectives

• Raise Visibility of Environmental Strategy
• Reduce Global Warming Emissions from 2010 Levels by 1%
• Reduce Product Energy Requirements by at least 10% on Current Flagship Products; Develop Plan for 30% Reduction on Next Generation
• Expand Supply Chain Materials Management; Launch Supply Chain Sustainability Program
• Improve Health and Safety Management System

2010 Environmental Health and Safety Performance Results

• Obtain recertification of ISO 14001 Environmental Management System: In 2010, Axcelis celebrated our 10th anniversary of ISO 14001 certification.
• Track and Report Global Warming Emissions: The direct emissions of greenhouse gases generated at the Beverly, MA manufacturing site equaled approximately 6000 tons of CO2 and CO2 equivalents. If we add indirect global warming emissions from the generation of electricity we purchase and the emissions from employee vehicles while commuting, our total global warming footprint climbs to ~17,000 Tons.
• Demonstrate Capability to Obtain Small Quantity Generator Hazardous Waste Status: Axcelis reduced hazardous waste generation to less than 2200 pounds per month. This will allow Axcelis to change permit status from a Large to a Small Quantity Generator of hazardous waste.
• Implement REACh Compliance Strategy: Axcelis successfully implemented systems to increase our ability to communicate with customers regarding hazardous chemical substances within our products in relation to the European REACH (Registration, Evaluation, and Authorization of Chemicals) regulation.
• Improve Safety Performance: Axcelis met its goal to reduce its company-wide accident rate. We achieved our lowest Recordable Injury and Illness Rate ever in 2010 and finished the year with 10 consecutive months without a recordable incident. During this time, we also continued to increase our reports of Near Misses and First Aid only accidents.
• Communicate the Value of Safety: To raise visibility of the EHS program at Axcelis, EHS proactively communicated regular safety messages and facilitated ongoing, interactive training for all staff.
• EHS Training Completed On Time: All new operations employees now receive all of their required EHS training during the first week of employment. Overall, we finished the year with an on time completion rate for EHS training of 94.1%, just short of our 95% goal.