Current News

September 27, 2017
Axcelis Announces Multiple 'Purion XE' Orders From Leading Chip Makers In China And AP Region
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September 7, 2017
Axcelis Announces Multiple Orders For 'Purion H' Including Successful Closure of an Evaluation
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Technology Spotlight

New Implant App Avaliable:

Get insight into your implant process to optimize your performance and your productivity with the new 2D Implant Simulator, which now includes the ability to simulate Plasma doping as well as Beamline doping.
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Meet the Axcelis Team

Meet some of the people who are contributing to the future of semiconductor manufacturing technology.
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