Current News

December 9, 2014
Axcelis Wins Multi System, Follow-on Order For Purion M and Purion XE
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November 13, 2014
Axcelis Announces Participation In Midtown CAP Summit Investor Event
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Technology Spotlight

New Implant App Avaliable:

Get insight into your implant process to optimize your performance and your productivity with the new 2D Implant Simulator, which now includes the ability to simulate Plasma doping as well as Beamline doping.
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Learn More About Us

Meet the Axcelis Team

Meet some of the people who are contributing to the future of semiconductor manufacturing technology.
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